(a) Scanning electron microscopy (SEM) image of a micromachined silicon cantilever with an integrated tip pointing in the [001] crystal direction. (b) Micrograph of a qPlus’sensora cantilever made from a quartz tuning fork [12]. (c)-(f) SEM images of some typical commercial AFM probes: (c) Silicon probe suitable for contact mode. (d) Super sharp silicon probe, suitable for non-contact and tapping modes. (e) High aspect ratio tip. (f) Pyrex-nitride probe. (NanoWorld & PointProbe AFM tip). Reproduced from [12]. © IOP Publishing Ltd. All rights reserved.

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